Control of silicon nanoparticle size embedded in silicon oxynitride dielectric matrix
نویسندگان
چکیده
منابع مشابه
Si Nanocrystals Embedded in a Silicon Oxynitride Matrix
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2013
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.4816042